| 摘要 |
PROBLEM TO BE SOLVED: To decrease a thickness and a size of a stage device. SOLUTION: A base plate 12 of a stage device 10 has a recess 20 for accommodating each plate on a lower face side, and the recess 20 incorporates a tilt plate 14, an XY stage 16, and aθ-axis stage 18. Also, the stage device 10 accommodates an X-axis plate 50 in the recess of the tilt plate 14 and accommodates a Y-axis plate 52 in the recess of the X-axis plate 50, and also, guides the X-axis plate 50 and the Y-axis plate 52 from the side, and drives them from the side. Aθ-axis plate 90 is adjusted in position in aθz-axis direction, is also adjusted in Z,θx,θy-axis directions via the tilt plate 14, is adjusted in an X-axis direction via the X-axis plate 50, and is adjusted in a Y-axis direction via the Y-axis plate 52. COPYRIGHT: (C)2007,JPO&INPIT |
