| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer carrier capable of surely removing water droplets without damaging a wafer upon its cleaning. SOLUTION: The wafer carrier for accommodating a plurality of wafers comprises, in order to release and dry water droplets adhering to the wafer W by an apparatus using centrifugal force, a set of holders 11a, 11b having a plurality of grooves for holding the plurality of the wafers W in parallel at a predetermined interval; supporters 12a, 12b for supporting, by fixing, these holders 11a, 11b; and stoppers 13a, 13b for stopping the wafers so as to prevent the wafers W flying out from the holders 11a, 11b when applying the centrifugal force thereto. The stoppers 13a, 13b consist of a contact C with the wafer W formed into a plate shape, and consist of an elastic part S other than the contact, formed with an elastic metal plate having a plurality of holes drilled therethrough and configured in a lattice shape. COPYRIGHT: (C)2007,JPO&INPIT |
