| 摘要 |
PROBLEM TO BE SOLVED: To provide a narrow-banded ultraviolet laser device capable of keeping a laser beam in a high grade by suppressing the variation of temperature gradients at light transparent sections. SOLUTION: The narrow-banded ultraviolet laser device, in which the laser beam is narrow-banded by a narrow-banding unit having prisms and a grating (33), comprises light shielding elements (37A to 37C) respectively having light transparent sections (47A to 47C), each constituted by an opening for transmitting the laser beam, and light shielding sections (49A to 49C) that surround the light transmitting sections and remove undesired laser lights (11A) from the light path to form the laser beam (11) in a predetermined shape, wherein heating means (45) for heating the light transparent sections are provided in the vicinity of the light shielding elements. COPYRIGHT: (C)2007,JPO&INPIT
|
