| 摘要 |
PROBLEM TO BE SOLVED: To provide a high tact apparatus and a method for washing a disk that can improve washing effect. SOLUTION: The method for washing a disk enables ejection of a washing liquid onto a disk subsequent to forming froths in the washing liquid by applying ultrasonic vibration to the washing liquid upon washing a surface of a disk by ejecting a washing liquid thereon. COPYRIGHT: (C)2007,JPO&INPIT
|
