| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device, a liquid delivery head, and a liquid delivery device that are of high piezoelectric characteristics and are excellent in durability. <P>SOLUTION: A piezoelectric device is employed comprising a main component of Pb(Zr, Ti)O<SB>3</SB>with an a-domain and a c-domain of tetragon, and a pair of electrodes connected to the piezoelectric film. However, if the piezoelectric film is formed on a substrate and Zr/(Zr+Ti) is over 0.4 and than 0.7, a kind of piezoelectric films is used where the volume percentage of the c-domain to the sum of the a-domain and the c-domain is 20 to 60%, or at least part of the a-domain and at least part of the c-domain are in a mirrored image of twin crystal where (N0N) surfaces (N is an integer except 0) are of twin planes. Or, a film is employed where ratio of the axial length 001/the axial length 100 of the axial length 001 and the axial length 100 each configuring the a-domain and the c-domain is 1.004 or more and 1.040 or less. <P>COPYRIGHT: (C)2007,JPO&INPIT |
