| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide beam welding equipment and a beam welding method where welding can be securely performed while power output is reduced. <P>SOLUTION: In the method where a work provided with a lid 10a and a package 10b is irradiated with a laser beam LB2 or an electron beam, thereby welding is performed so as to seal the work; the position to be simultaneously emitted with a beam spot in both of the lid and the package is irradiated with the beam. In this way, the side faces of the lid are melted, also, the bottom face of the lid is effectively melted by the increase of the temperature in the package, and further, the wettability of the seal face in the package is improved by the heating of the package itself. Thus, the lid and the package can be securely welded by the beam welding equipment. Further, the power output of the beam can be reduced since the diffusion of the heat on the lid is suppressed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
