| 摘要 |
PROBLEM TO BE SOLVED: To simply, quickly, and accurately check abnormalities, such as an operational malfunction and a seat leakage of a plurality of valves assembled in a fluid supply system, using a flow rate control device, without removing the valves from a pile line of the fluid supply system with the use of a function of the flow rate control device having a pressure sensor. SOLUTION: In the fluid supply system having the flow rate control device provided with the pressure sensor that has a flow rate setting mechanism, a flow rate/pressure display mechanism and/or a flow rate self-diagnosis mechanism, abnormality of the flow rate control device and a control valve on the upstream side or on the downstream side of the flow rate control device is detected, by using a pressure display value of the flow rate control device and/or a diagnosis value of the flow rate self-diagnosis mechanism. COPYRIGHT: (C)2007,JPO&INPIT
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