| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing apparatus of a display device capable of suppressing position shifting of a substrate as a vapor-deposition object and a metal mask, and a method of manufacturing the display device. SOLUTION: This is the manufacturing apparatus of a display device having a display element for every pixel, and comprises a first chamber 210 in which a first functional layer to constitute an organic active layer is vapor deposited, a second chamber 220 which has a metal mask 222 having apertures corresponding to each pixel and vapor-deposits a second functional layer on every pixel on the first functional layer through the metal mask 222, a transfer chamber 230 which connects the first chamber 210 and the second chamber 220 and transfers a treating substrate SUB vapor-deposited with the first functional layer to the second chamber 220, and a warming mechanism 240 which warms and keeps the treating substrate SUB to a prescribed temperature. COPYRIGHT: (C)2007,JPO&INPIT
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