| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording disk capable of preventing ripples from being generated on the liquid surface of a liquid chemical when performing an immersion process to a substrate for the magnetic recording disk, and an immersion device for manufacturing the magnetic recording disk. SOLUTION: When forming a thin film of a lubricating layer or the like by an immersion method on the surface of the substrate 10 for the magnetic recording disk, the substrate 10 for the magnetic recording disk is clamped in a vertical posture between a substrate support 300 inserted to the center hole 111 of the substrate 10 for the magnetic recording disk and a substrate receiver 400 arranged on the upper side, the almost lower half part of the substrate 10 for the magnetic recording disk is immersed in the liquid chemical 22 in the state, the substrate support 300 and the substrate receiver 400 are rotated around an axis, and the entire periphery of the substrate 10 for the magnetic recording disk is immersed in the liquid chemical. COPYRIGHT: (C)2007,JPO&INPIT
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