| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of inputting each measuring point by simple input operation without requiring teaching, when successively measuring measuring objects that have identical shape. SOLUTION: This device is equipped with a measuring position information input control part 33 for placing a plurality of measuring object groups S on a stage 14, by using a loading tool 15 for regularly arraying the measuring object groups having the same shape by fixed intervals, and urging the input of measuring position information containing a first-time measuring point position, a distance between measuring points and the repeated number of the times of measurement; a measuring point position calculation part 34 for calculating each measuring point position, based on the inputted measuring position information; and a stage-driving mechanism control part 35 for moving successively each calculated measuring point position into a measuring visual field of an X-ray measuring optical system. COPYRIGHT: (C)2007,JPO&INPIT
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