发明名称 |
Semiconductor memory device with a capacitor formed therein and a method for forming the same |
摘要 |
To integrate a capacitor device ( 40 ) into the region of a semiconductor memory device with a particularly small number of process steps, a lower electrode device ( 43 ) and an upper electrode device ( 44 ) of the capacitor device ( 40 ) are provided to be formed directly underneath or directly above the material region ( 30 ) which has the memory elements ( 20 ), in such a way that as a result at least a part of the material region ( 30 ) which has the memory elements ( 20 ) functions at least as part of the respective dielectric ( 45 ) between the electrode devices ( 43, 44 ).
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申请公布号 |
US2007082413(A1) |
申请公布日期 |
2007.04.12 |
申请号 |
US20020478642 |
申请日期 |
2002.05.21 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
NUETZEL JOACHIM;SCHLOESSER TILL;SCHWARZL SIEGFRIED;WURN STEFAN |
分类号 |
H01L21/00;H01L27/10;H01L;H01L21/336;H01L21/8246;H01L27/105;H01L27/22;H01L43/08 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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