发明名称 Semiconductor memory device with a capacitor formed therein and a method for forming the same
摘要 To integrate a capacitor device ( 40 ) into the region of a semiconductor memory device with a particularly small number of process steps, a lower electrode device ( 43 ) and an upper electrode device ( 44 ) of the capacitor device ( 40 ) are provided to be formed directly underneath or directly above the material region ( 30 ) which has the memory elements ( 20 ), in such a way that as a result at least a part of the material region ( 30 ) which has the memory elements ( 20 ) functions at least as part of the respective dielectric ( 45 ) between the electrode devices ( 43, 44 ).
申请公布号 US2007082413(A1) 申请公布日期 2007.04.12
申请号 US20020478642 申请日期 2002.05.21
申请人 INFINEON TECHNOLOGIES AG 发明人 NUETZEL JOACHIM;SCHLOESSER TILL;SCHWARZL SIEGFRIED;WURN STEFAN
分类号 H01L21/00;H01L27/10;H01L;H01L21/336;H01L21/8246;H01L27/105;H01L27/22;H01L43/08 主分类号 H01L21/00
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