发明名称 COOLING SYSTEM, OPERATION METHOD FOR THE COOLING SYSTEM, AND PLASMA PROCESSING SYSTEM USING THE COOLING SYSTEM
摘要 <p>A cooling system in which a compressor (1), a heat source (2), a heat exchanger (3), and a buffer tank (4) are connected in that order by piping (5) to form a closed circuit. In the closed circuit, nitrogen as the refrigerant is circulated without being in contact with the outside air. The refrigerant is sufficient if only it is gas (refrigerant) other than air, absorbs heat from the heat source (2) without being liquefied when circulated in the closed circuit, and discharges the heat to the outside at the heat exchanger (3).</p>
申请公布号 WO2007040033(A1) 申请公布日期 2007.04.12
申请号 WO2006JP318385 申请日期 2006.09.15
申请人 SHARP KABUSHIKI KAISHA;KISHIMOTO, KATSUSHI 发明人 KISHIMOTO, KATSUSHI
分类号 F25B9/00;H01L21/22 主分类号 F25B9/00
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