| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To realize multipoint distance measurement for an object under measurement, using a single phase-difference sensor and perform high-precision measurement by reducing the measurement errors caused by individual differences in shape change. <P>SOLUTION: The distance measuring apparatus is provided with a drive mechanism 51 for driving the phase-difference sensor 13 comprising a pair of optical detection sections 13a, 13b that are arranged in a row in a direction perpendicular to the arrangement direction (the sensor row direction) of the pair of optical detection sections 13a, 13b. The distance to the object under measurement is measured in the sensor row direction with the phase-difference sensor 13 set at a predetermined position. The distance to the object under measurement is, however, measured in a direction perpendicular to the sensor row direction, by moving the phase-difference sensor 13 via the drive mechanism 51. Multipoint measurement for the object under measurement using one phase-difference sensor 13 can be thereby achieved to perform high-precision measurement, by reducing the measurement errors due to the individual differences in the change of shape. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
