| 摘要 |
PROBLEM TO BE SOLVED: To provide a data sampling system of an X-ray inspection device that has high inspection efficiency and can shorten the inspection time, even when there are very large number of channels in use. SOLUTION: The data sampling system of the X-ray inspection device irradiates X-rays 3 to an inspected object 1 and inspects the inspected object, based on the intensity of the transmitted X-rays. The data sampling system comprises a linear irradiating device 14 for linearly irradiating predetermined X-rays to the inspected object, a linear detector 16 of many channels for detecting the intensity distribution of the linear X-rays having transmitted the inspected object, an X-ray sensor substrate 22 for simultaneously A/D-converting and outputting the detected signals of the linear detector, without changing-over the channels, and a sensor timing IF substrate 24 for transmitting the sensor values of all the channels received from the X-ray sensor substrate, to a frame grabber substrate 26. COPYRIGHT: (C)2007,JPO&INPIT
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