| 摘要 |
PROBLEM TO BE SOLVED: To provide a production method of a probe card capable of inhibiting plastic deformation of contact probes by a simple work. SOLUTION: Liquid insulating polymeric material is injected utilizing a capillarity phenomenon between a contact probe 10 supported cantilever-like on a contact substrate 20 and the contact substrate 20 to form the elastomer 60 by solidifying the polymeric materials. Thereby, the elastomer 60 can be made to intervene between the contact probe 10 and the contact substrate 20 by a simple work, resulting in possible inhibition of the contact probe 10 from plastic deformation. COPYRIGHT: (C)2007,JPO&INPIT
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