| 摘要 |
PROBLEM TO BE SOLVED: To irradiate a microregion on a sample with X rays of a high intensity by improving the focus blur at a focusing end of a multi-capillary X-ray lens. SOLUTION: A small-diameter X-ray lens (FZP) 3 made of multilayer film Fresnel zone plates is set up outside the focusing end 2a on the exit side of the multi-capillary X-ray lens (MCX) 2, the X rays emitted from an X-ray source by the MCX 2 are efficiently collected, the diameter of the X rays is reduced to some extent, the X rays are introduced into the FZP 3 and the convergence diameter of the X rays is reduced further by the FZP 3; so that the X rays can be focused on an extremely small region 4. COPYRIGHT: (C)2007,JPO&INPIT
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