| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability and reliability of bumps. SOLUTION: A plate 10 having plural recessed parts, in which a recessed part 14x formed on an outer peripheral area is smaller than a recessed part 14y formed on a center area is prepared, these recessed parts 14x, 14y are filled with metal paste 16, by squeezing and the plate 10 is heated to form metallic balls 26 in the recessed parts 14x, 14y. Then the plate 10 is brought close to a device 30 for forming bumps, and the balls 26 in the recessed parts 14x, 14y of the plate 10 are transferred to the device 30 to form bumps. |
