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发明名称
BEAM SOURCE
摘要
申请公布号
EP1220272(A4)
申请公布日期
2007.04.11
申请号
EP20000946335
申请日期
2000.07.14
申请人
EBARA CORPORATION
发明人
HATAKEYAMA, MASAHIRO;ICHIKI, KATSUNORI;WATANABE, KENJI;SATAKE, TOHRU
分类号
H01J27/16;G21G4/02;H01J37/08;H01J37/32;H05H3/00
主分类号
H01J27/16
代理机构
代理人
主权项
地址
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