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经营范围
发明名称
WIRING PATTERN INSPECTING APPARATUS
摘要
申请公布号
EP1109009(B1)
申请公布日期
2007.04.11
申请号
EP19990933175
申请日期
1999.07.29
申请人
IBIDEN CO., LTD.
发明人
OKADA, MASAHIRO
分类号
G01N21/88;G01N21/956;G06T5/00;G06T5/20;G06T7/00;H01L21/3205;H01L21/66
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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