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发明名称
Method and apparatus for etching silicon
摘要
申请公布号
EP1069598(B1)
申请公布日期
2007.04.11
申请号
EP20000114188
申请日期
2000.07.13
申请人
M-FSI, LTD;DISCO CORPORATION
发明人
YONEYA, AKIRA;KOBAYASHI, NORIYUKI;IZUTA, NOBUHIKO
分类号
H01L21/00;H01L21/306
主分类号
H01L21/00
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代理人
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