发明名称 LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD
摘要 A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections.
申请公布号 KR20070038468(A) 申请公布日期 2007.04.10
申请号 KR20067027599 申请日期 2005.06.22
申请人 KABUSHIKI KAISHA WATANABE SHOKO;TODA MASAYUKI 发明人 TODA MASAYUKI;UMEDA MASARU
分类号 H01L21/68;B65G47/28;B65G49/07;B65G51/03 主分类号 H01L21/68
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