发明名称 |
LEVITATION TRANSPORTATION DEVICE AND LEVITATION TRANSPORTATION METHOD |
摘要 |
A levitation transportation device capable of adjustment when an object being transported is displaced from the center of a transportation path, A levitation transportation device having a transportation path forming a transportation router for an object to be transported, a plurality of jetting nozzles for transporting the object in a levitated manner along the transportation path, one or more detection sections for detecting the direction of the transportation of the object being transported in the transportation path and a control section for independently controlling the plurality of jetting nozzles based on a detection result by the detection sections. |
申请公布号 |
KR20070038468(A) |
申请公布日期 |
2007.04.10 |
申请号 |
KR20067027599 |
申请日期 |
2005.06.22 |
申请人 |
KABUSHIKI KAISHA WATANABE SHOKO;TODA MASAYUKI |
发明人 |
TODA MASAYUKI;UMEDA MASARU |
分类号 |
H01L21/68;B65G47/28;B65G49/07;B65G51/03 |
主分类号 |
H01L21/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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