DEVICE OF BATCH-TYPE ATOMIC LAYER DEPOSITION AND THE METHOD OF DEPOSITIONING ATOMIC LAYER USING THE SAME,申请号KR20050093571-传众专利搜索

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发明名称	DEVICE OF BATCH-TYPE ATOMIC LAYER DEPOSITION AND THE METHOD OF DEPOSITIONING ATOMIC LAYER USING THE SAME
摘要
申请公布号	KR20070038348(A)	申请公布日期	2007.04.10
申请号	KR20050093571	申请日期	2005.10.05
申请人	HYNIX SEMICONDUCTOR INC.	发明人	CHANG, JUN SOO;CHO, HO JIN;PARK, DONG SU;LEE, KEUM BUM
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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