| 摘要 |
An apparatus for transverse characterization of materials includes a lower pattern of contacts, separated by spacings, a material, and an upper pattern of a multiplicity of contacts, separated by spacings differing from the spacings of the lower pattern. The transverse characterization method includes receiving lower pattern of a multiplicity of contacts, separated by spacings along a surface, with a material above the surface, successively placing an upper contact near the upper surface of the material in an upper pattern of locations separated by spacings differing from the spacings of the lower pattern, measuring the characteristics between the upper contact and one or more contacts of the lower pattern and evaluating the measured characteristics to previous measurements, wherein the evaluation provides the transverse characterization.
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