| 摘要 |
In various embodiments of the invention, an anti-stiction coating 160, 170 is formed on at least one surface of an interior cavity of a MEMS device 80. Particular embodiments provide an anti-stiction coating 160, 170 on one or more mirror surfaces of an interferometric light modulation device (iMoD). In other embodiments, an interferometric light modulation device is encapsulated within a package and the anti-stiction coating 160, 170 is applied after the package is fabricated. In one embodiment, one or more orifices are defined in the package, e.g., in a seal, a substrate or a backplate and the anti-stiction coating material is supplied into the interior of the package via the orifice(s). In one embodiment, the anti-stiction coating material includes a self-aligned (or self-assembled) monolayer. In yet another embodiment, the anti-stiction layer coating can be incorporated into a release process where a sacrificial layer of an interferometric light modulation device is etched away with the use of a gas. |
