| 摘要 |
FIELD: pressure sensor or element, sensitive to pressure with pressure sensor. ^ SUBSTANCE: in accordance to invention, dividing membrane is connected to body of pressure sensor so that a force chamber is formed between upper surface of body and dividing membrane. Pressure sensor is provided with two supporting channels, which in comparison to each other have varying hydraulic properties, including hydrodynamic resistance and/or hydraulic capacity of respectively first or second force channels. ^ EFFECT: improved dynamic characteristics of pressure sensor. ^ 2 cl, 3 dwg |
