发明名称 Giant magnetoresistance structure
摘要 The present invention relates to a method for producing a GMR structure in which a metallic multiple layer is applied onto a carrier and in which the metallic multiple layer is patterned to produce the GMR structure, the carrier having a structure before the metallic multiple layer is applied and the patterning of the metallic multiple layer is performed by CMP. The present invention also relates to a GMR structure having a carrier and a patterned metallic multiple layer positioned on the carrier, the patterned metallic multiple layer being situated in one or more depressions of the carrier. In addition, the present invention relates to a use of GMR structures.
申请公布号 US7202544(B2) 申请公布日期 2007.04.10
申请号 US20040470956 申请日期 2004.01.26
申请人 ROBERT BOSCH GMBH 发明人 GRUEN DETLEF;FISCHER FRANK;SIEGLE HENRIK;HEIN PETER
分类号 G01D5/18;H01L31/00;G01D5/245;G01R33/09;H01L43/08;H01L43/12 主分类号 G01D5/18
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