Micro-fluidic anti-microbial filter

摘要

An anti-microbial filter ( 105 ) for a micro-fluidic system ( 100 ) includes a silicon-based filter membrane ( 213 ) having holes ( 218 ) formed therein. The membrane ( 213 ) is formed on a substrate ( 211 ). One side of the filter membrane ( 213 ) has an anti-microbial coating ( 216 ) between the holes ( 218 ) on the filter membrane ( 213 ) and the other side can include filter supports formed from a silicon substrate. A method for making the anti-microbial filter ( 105 ) includes forming a filter membrane ( 213 ) on a substrate ( 211 ), forming holes ( 218 ) in the membrane ( 213 ) by providing a filter mask ( 215 ) and etching holes ( 218 ) through holes ( 222 ) in the mask ( 215 ). Then portions of the substrate ( 211 ) are removed from the filter membrane ( 213 ) using a masking and etching process to expose the holes ( 218 ). An anti-microbial coating is applied to the membrane ( 213 ) adjacent the holes ( 218 ).