发明名称 Front opening substrate container with bottom plate
摘要 A substrate container and a bottom plate are connected with a mechanism for adjusting the distance between the container and bottom plate, by, e.g., a threaded connection between two members of the connector mechanism. Also provided are a duck-billed valve for venting the container and a dampener for minimizing damage due to shocks.
申请公布号 US7201276(B2) 申请公布日期 2007.04.10
申请号 US20040982400 申请日期 2004.11.05
申请人 ENTEGRIS, INC. 发明人 BURNS JOHN;FULLER MATTHEW A.;KING JEFFERY J.;FORBES MARTIN L.;SMITH MARK V.
分类号 B65D85/30;B65D;H01L21/673 主分类号 B65D85/30
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