发明名称 Thin film transistor and method for fabricating the same
摘要 A thin film transistor formed by using a Metal Induced Lateral Crystallization process and method for fabricating the same. The thin film transistor comprises an active layer having source/drain regions and a channel region, a gate electrode, an insulating layer having contact holes for exposing a portion of each of the source/drain regions, and a crystallization inducing pattern exposing a portion of the active layer. The source/drain electrodes are coupled to the source/drain regions through the contact holes, and the crystallization inducing pattern does not couple the source/drain regions to the source/drain electrodes.
申请公布号 US7202501(B2) 申请公布日期 2007.04.10
申请号 US20040989642 申请日期 2004.11.17
申请人 SAMSUNG SDI CO., LTD. 发明人 KIM HOON;LEE KI-YONG;SEO JIN-WOOK
分类号 H01L21/20;H01L29/04;H01L21/336;H01L21/84;H01L29/417;H01L29/786 主分类号 H01L21/20
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