A system comprising automatic apparatus for automatic optical inspection (AOI), verification and correction of defects in an article, and a processor operative to select between AOI, verification and correction for performing on the article.
申请公布号
US7203355(B2)
申请公布日期
2007.04.10
申请号
US20020327115
申请日期
2002.12.24
申请人
ORBOTECH LTD.
发明人
LEVI MICHAEL;SOLOMON BERNARD;ASPIR DORON;FRIDMAN ELAD
