| 发明名称 |
Methods for forming composite coatings on MEMS devices |
| 摘要 |
The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.
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| 申请公布号 |
US7201937(B2) |
申请公布日期 |
2007.04.10 |
| 申请号 |
US20030641547 |
申请日期 |
2003.08.15 |
| 申请人 |
MICROSURFACES, INC. |
发明人 |
ZHU XIAOYANG |
| 分类号 |
B05D5/12;B05D1/18;B05D3/02;B05D5/08;B81B3/00;B81C1/00;C09D4/00;C23C16/00 |
主分类号 |
B05D5/12 |
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