发明名称 |
Capacitance type physical quantity sensor |
摘要 |
A capacitance type physical quantity sensor detects physical quantity. The sensor includes a movable portion including a movable electrode and a fixed portion including a fixed electrode. The fixed electrode includes a detection surface facing a detection surface of the movable electrode. The movable electrode is movable toward the fixed electrode in accordance with the physical quantity so that a distance between the detection surfaces is changeable. At least one of the movable and the fixed electrodes includes a groove. The groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface.
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申请公布号 |
US7201053(B2) |
申请公布日期 |
2007.04.10 |
申请号 |
US20040834183 |
申请日期 |
2004.04.29 |
申请人 |
DENSO CORPORATION |
发明人 |
YOSHIOKA TETSUO;TESHIGAHARA AKIHIKO;OHARA JUNJI;TAKEUCHI YUKIHIRO;YAMAMOTO TOSHIMASA;KANO KAZUHIKO |
分类号 |
G01P15/125;G01P9/04;G01P15/08;H01L29/84 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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