发明名称 |
Projection exposure machine comprising a projection lens |
摘要 |
A projection exposure machine comprises a projection lens with a lens arrangement and at least one stop. The lens arrangement comprises a group of optical elements which is arranged between the stop and the image plane. An optical element of the group situated close to the image plane has a thickness of at least 6.5% of the entire stop diameter.
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申请公布号 |
US7203007(B2) |
申请公布日期 |
2007.04.10 |
申请号 |
US20040915972 |
申请日期 |
2004.08.11 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
SCHUSTER KARL-HEINZ |
分类号 |
G02B9/00;G02B3/08;G02B3/14;G02B13/14;G02B13/18;G02B17/08;G03B27/54;G03F7/20 |
主分类号 |
G02B9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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