摘要 |
Polymerizable fluorinated ester compounds having formula (1) or (2) are novel wherein R<SUP>1 </SUP>is H, methyl or trifluoromethyl, R<SUP>2 </SUP>is a divalent hydrocarbon group, R<SUP>3 </SUP>is H or a monovalent hydrocarbon group, or R<SUP>2 </SUP>and R<SUP>3</SUP>, taken together, may form a ring, R<SUP>4 </SUP>is H, OH or a monovalent hydrocarbon group, and R<SUP>5 </SUP>is an acid labile group. They are most useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions
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