发明名称 THREE-COORDINATE POSITIONER
摘要 FIELD: piezoelectric voltage-to-mechanical-displacement converting devices. ^ SUBSTANCE: proposed positioner has object holder and case. The latter mounts three drives incorporating at least one biform member connected through first flexible pusher to movable member. Biform members are, essentially, stacks, each incorporating piezoelectric disk joined along plane with metal diaphragm. Object holder is mounted on fixed member. Object holder can be installed on movable member with aid of lever. Pushers have different stiffness. Piezoelectric disks and metal diaphragms have holes in vicinity of their connection to flexible pushers. ^ EFFECT: extended scanning range, enhanced reliability. ^ 4 cl, 2 dwg
申请公布号 RU2297078(C1) 申请公布日期 2007.04.10
申请号 RU20050134279 申请日期 2005.11.08
申请人 ZAO "NANOTEKHNOLOGIJA-MDT" 发明人 BYKOV VIKTOR ALEKSANDROVICH;GOLUBOK ALEKSANDR OLEGOVICH;KOTOV VLADIMIR VALER'EVICH;SAPOZHNIKOV IVAN DMITRIEVICH
分类号 H01L41/09;H02N2/02 主分类号 H01L41/09
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