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发明名称
GAS ABATEMENT
摘要
申请公布号
KR20070038139(A)
申请公布日期
2007.04.09
申请号
KR20077002773
申请日期
2005.08.02
申请人
THE BOC GROUP PLC
发明人
STANTON GARETH;SEELEY ANDREW JAMES;SMITH JAMES ROBERT
分类号
H01L21/00;B01D53/30;B01D53/68;F23D14/00;F23G7/06;H01L21/3065
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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