SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD,申请号KR20000041329-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
摘要
申请公布号	KR100704749(B1)	申请公布日期	2007.04.09
申请号	KR20000041329	申请日期	2000.07.19
申请人		发明人
分类号	H01L21/30;H01L21/00	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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