APPARATUS FOR TRANSFERRING A WAFER AND EQUIPMENT FOR MANUFACTURING A WAFER HAVING THE SAME,申请号KR20050092802-传众专利搜索

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发明名称	APPARATUS FOR TRANSFERRING A WAFER AND EQUIPMENT FOR MANUFACTURING A WAFER HAVING THE SAME
摘要
申请公布号	KR20070037790(A)	申请公布日期	2007.04.09
申请号	KR20050092802	申请日期	2005.10.04
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, JONG HYUN
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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