SUBSTRATE PROCESSING APPARATUS,申请号KR20000031752-传众专利搜索

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发明名称	SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR100704766(B1)	申请公布日期	2007.04.09
申请号	KR20000031752	申请日期	2000.06.09
申请人		发明人
分类号	H01L21/027;H01L21/30;G03F7/16;G03F7/20;G03F7/30;H01L21/00	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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