发明名称 Semiconductor integrated circuit device and method for fabricating the same
摘要 Provided are a semiconductor integrated device and a method for fabricating the same. The semiconductor integrated circuit includes a semiconductor substrate including a first dopant, a first conductive layer pattern formed on the semiconductor substrate, an interlayer dielectric layer formed on the first conductive layer pattern, a second conductive layer pattern formed on the interlayer dielectric layer, and a first vacuum ultraviolet (VUV) blocking layer which blocks a VUV ray radiated to the semiconductor substrate.
申请公布号 KR100703971(B1) 申请公布日期 2007.04.06
申请号 KR20050049016 申请日期 2005.06.08
申请人 发明人
分类号 H01L27/00;H01L29/78 主分类号 H01L27/00
代理机构 代理人
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