A method for manufacturing Ge-Sb-Te thin film on wafer,申请号KR20050078010-传众专利搜索

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发明名称	A method for manufacturing Ge-Sb-Te thin film on wafer
摘要
申请公布号	KR100704125(B1)	申请公布日期	2007.04.06
申请号	KR20050078010	申请日期	2005.08.24
申请人		发明人
分类号	H01L21/205;H01L27/10	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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