METAL COMPOSITE DIAMOND-LIKE CARBON (DLC) FILM, METHOD AND APPARATUS FOR FORMING THE SAME, AND SLIDE MEMBER

摘要

A DLC film that has a low friction coefficient and that is superior in adhesion and wear resistance, and a method for forming the film are provided. A slide member having a protective film that has a low friction coefficient and that is superior in wear resistance and adhesion, and a method for forming the member are provided. Without using a solid carbon target, a metal composite diamond-like carbon (DLC) film is formed on a base material by introducing hydrocarbon gas as a metal target alone is sublimated by arc discharge and ionizing the metal and the hydrocarbon.