Integrated circuit analyzing device, has deviation unit applying laser beam on excitation zone of circuit simultaneous to observation of circuit by light emission analyzing device and single point detector that are protected by mirrors

摘要

#CMT# #/CMT# The device (10) has a light emission analyzing device (22) and a single point detector for observing light emitted by a localized observation zone of an integrated circuit. A deviation unit (30) applies a laser beam generated by a laser source (26) on an excitation zone of the circuit simultaneous to the observation of the circuit. A semi-reflecting mirror (M1) and a reflecting mirror (M2) protect the analyzing device (22) and detector against incident and reflected light. #CMT#USE : #/CMT# Used for analyzing an integrated circuit. #CMT#ADVANTAGE : #/CMT# The deviation unit applies the laser beam generated by the laser source on the excitation zone of the circuit simultaneous to the observation of the circuit using the light, thus permitting to simultaneously observe the circuit using light as well as laser beam. The operating conditions of the circuit are therefore modified. The mirrors protect the light emission analyzing device and detector against incident and reflected light, thus preventing the disturbances in measurements carried out by the emission analyzing device. The device permits to effectively detect malfunctioning in the circuit. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a schematic view of an integrated circuit analyzing device. M1 : Semi-reflecting mirror M2 : Reflecting mirror 10 : Integrated circuit analyzing device 22 : Light emission analyzing device 26 : Laser source 30 : Deviation unit.