| 摘要 |
At least one of an organic emitting layer, an electron injection layer and an electron transfer layer for pixels of an organic electroluminescence panel is formed from a deposition material by deposition via mask holes of a multilayer metal mask. The multilayer metal mask has a first metal layer on the side of a transparent substrate for forming the organic electroluminescence panel and a second metal layer on the side of a supply source of the deposition material, which metal layers are different in material. The second metal layer is made of a thick plate of magnetic material. The area of each first mask hole of the first metal layer is made equal to or smaller than that of each second mask hole of the second metal layer. Such a configuration can provide a metal mask forming organic electroluminescence devices with high reliability, high mechanical strength and high performance. Thus, a high-definition and high-quality organic electroluminescence display panel can be realized. |
