| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor capable of increasing an electric signal output therefrom by inhibiting an electrode plate from vibrating. SOLUTION: A microphone (sensor) 30 comprises a diaphragm 4a provided in a vibrative manner, an electrode plate 7a opposed to the diaphragm 4a at a prescribed distance having a sound hole 9 vertically penetrating it and a lower support layer 5, and an upper support layer 8 made of SiN having an elastic modulus higher than the elastic modulus of polysilicon constituting the electrode plate 7a for supporting the electrode plate 7a. The lower support layer 5 is so formed as to cover the reverse surface of the electrode plate 7a, and the upper support layer 8 is so formed as to cover the top surface of the electrode plate 7a. COPYRIGHT: (C)2007,JPO&INPIT
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