发明名称 |
Scanning probe microscopy method and apparatus utilizing sample pitch |
摘要 |
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) to perform sample measurements using a survey scan that is less than five lines, and more preferably two lines, to accurately locate a field of features of a sample. This is accomplished by selecting a step distance between adjacent lines of the survey scan that does not equal the pitch of the features in a direction orthogonal to the direction the survey scan traverses, i.e., does not equal the pitch of the features in the scan direction, X<SUB>PO</SUB>. The aspect ratio of the scans can also be modified to further improve sample throughput.
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申请公布号 |
US2007075243(A1) |
申请公布日期 |
2007.04.05 |
申请号 |
US20050241093 |
申请日期 |
2005.09.30 |
申请人 |
KNEEBURG DAVID A;JAIN ROHIT;OSBORNE JASON R;YAO WEI;KLONOWSKI MATTHEW T;SCHMITZ INGO |
发明人 |
KNEEBURG DAVID A.;JAIN ROHIT;OSBORNE JASON R.;YAO WEI;KLONOWSKI MATTHEW T.;SCHMITZ INGO |
分类号 |
G01Q10/00;G01Q10/06;G01Q30/04;G01Q60/34 |
主分类号 |
G01Q10/00 |
代理机构 |
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