DRAWING DATA ACQUIRING METHOD AND DEVICE, AND DRAWING METHOD AND APPARATUS

摘要

A method for acquiring exposure point data used for forming an exposure pattern on a substrate by exposure according to the exposure point data by means of an exposure head from an original image data according to a variation in shape of the substrate. The time required to acquire the exposure point data is reduced, and thereby the production efficiency is improved. Virtual exposure point data trace information on an original image data corresponding to the information on the virtual drawing trace of a micromirror of an exposure head (30) on a substrate (12) is acquired, trace data corresponding to the virtual drawing point data trace is acquired from the original image data and stored in a template storage section (56a) in advance, virtual exposure point data trace information corresponding to the information on the exposure trace of the micromirror on the substrate (12) during an actual exposure is determined, and trace data corresponding to the determined virtual exposure point data trace information is acquired as exposure point data corresponding to the actual exposure trace information .