| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid mixer for variably controlling the flow rate of each fluid while constantly holding a mixing rate, and a fluid controller which is suitably used for the fluid mixer. SOLUTION: This flow rate controller is provided with an analog output circuit for converting a digital command value (flow rate setting value) into an analog voltage value or an analog current value, and for outputting it; an analog input circuit for converting the input analog voltage value or analog current value into a digital command value, and for fetching it; a control valve driving circuit for proportionally controlling the valve opening of a flow rate control valve according to the digital command value applied through a communication interface or the digital command value input by converting the analog voltage value or the analog current value through the analog input circuit; and an analog scaling means for variably setting the correspondence relation of the digital command value and the analog input/output voltage value. COPYRIGHT: (C)2007,JPO&INPIT
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