METHOD AND DEVICE FOR INSPECTING ELECTROOPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for inspecting an electrooptical device that can decrease wrong inspection by an inspector by providing a plurality of inspection stages by inspection contents and specifying the respective stages in specified inspection contents to increase operation efficiency and accuracy of inspection and further equally maintain tact times of the respective inspection stages by performing flow processes using a conveyor even when an aging stage of heating an electrooptical panel for a relatively long time is included. SOLUTION: The method for inspecting the electrooptical device includes: the plurality of sheet type inspection stages of inspecting a plurality of display defects of the electrooptical panel by the inspection contents; and an aging stage where a plurality of electrooptical panels are heated while conveying them one after another, and a processing time for each electrooptical panel is needed longer than any of processing times in the plurality of respective inspection stages. COPYRIGHT: (C)2007,JPO&INPIT