DEVICE FOR MANUFACTURING ELECTROOPTICAL DEVICE, AND METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE BY USING THE MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a device for manufacturing an electrooptical device having a configuration such that a liquid drop sticking on an in-chamber wall surface of a liquid processing chamber owing a scatter during liquid processing is prevented from dripping on a carry-out/in opening when a processed body after the liquid processing in the liquid processing chamber is carried out of the liquid processing chamber through the carry-out/in opening to stick on the processed body being carried out again to form a drying stain on a processed surface of the processed body after being dried out. SOLUTION: In a washing and drying chamber 1 being the liquid processing chamber, a liquid drop removing part 210 is arranged which is shaped covering the carry-out/in opening 27 bored in the in-chamber wall surface 21. The liquid drop removing part 210 is rotated by a rotary motor 220 when a liquid crystal device 50 is carried out to move to below the carry-out/in opening 27. At this time, a horizontal part 211 of the liquid drop removing part 210 wipes away the liquid drop sticking on the in-chamber wall surface 21. COPYRIGHT: (C)2007,JPO&INPIT